Optical filters capable of single control parameter based wide tuning are implemented and studied.A prototype surface micromachined 1 3μm Si based MOEMS (micro opto electro mechanical systems) tunable filter exhibits a continuous and large tuning range of 90nm at 50V tuning voltage.The filter can be integrated with Si based photodetector in a low cost component for coarse wavelength division multiplexing systems operating in the 1 3μm band.
A novel bonding method using silicate gel as bonding medium is developed.High reflective SiO 2/Si mirrors deposited on silicon substrates by e-beam deposition are bonded to the active layers at a low temperature of 350℃ without any special treatment on bonding surfaces.The reflectivities of the mirrors can be as high as 99 9%.A Si-based narrow band response InGaAs photodetector is successfully fabricated,with a quantum efficiency of 22 6% at the peak wavelength of 1 54μm,and a full width at half maximum of about 27nm.This method has a great potential for industry processes.
