A two-dimensional hybrid simulation scheme is proposed to study the characteristics of dual-frequency （DF） capacitively coupled plasma （CCP） discharge based on the geometry of real device. Given the experimental parameters for argon plasma, the output from the fluid module such as ion density, number flux, electron temperature and the Monte-Carlo collision （MCC） results of ion energy distribution function （IEDF） as well as electron energy distribution function （EEDF） are obtained and discussed in detail. A novel complete floating double probe is designed to measure both density and temperature of electron and a quadrupole mass spectrometer is also equipped for IEDF investigations. The measurements on the density of bulk plasma, electron temperature and IEDF agree well, qualitatively, with the simulated results. A comparison with experimental results indicates that, since the structure of real device is taken into account, this model is capable of describing the global dynamic characteristics occurred in DF-CCP and presenting more reliable results than the model with an ideal chamber structure.
The conventional double-probe technique was improved with a combination of selfpowering and radio-frequency（RF） choking.RF perturbations in dual-frequency capacitively coupled discharge were effectively eliminated,as judged by the disappearance of self-bias on the probes.The improved technique was tested by spatially resolved measurements of the electron temperature and ion density in both the axial and radial directions of a dual-frequency capacitive plasma.The measured data in the axial direction were compared with simulation results,and they were excellently consistent with each other.The measured radial distributions of the ion density and electron temperature were influenced significantly by the lower frequency（LF） power.It was shown that superposition of the lower frequency to the higher frequency（HF） power shifted the maximum ion density from the radial center to the edge region,while the trend for the electron temperature profile was the opposite.The changing feature of the ion density distribution is qualitatively consistent with that of the optical emission intensity reported.
The EFIT （Equilibrium Fitting） code is modified for the equilibrium configuration reconstruction in HL-2A. Signals from Langmuir probe （LP） at the divertor target plates are employed in the reconstruction of divertor configurations. The results show that discharge #2895 starts with a limiter configuration and develops gradually into a divertor configuration after t = 230 ms. This transition process is clearly demonstrated by the LP signals for the reconstruction. The profiles of plasma parameters such as safety factor q, pressure and current density as well as the evolution of major shape parameters of plasma, such as the boundary magnetic fluxes, the positions of both x-point and magnetic axis, are calculated from the reconstructed configurations. The possibility to apply the method to the swing of strike point on the target plate is discussed.
A Langmuir probe and an ICCD are employed to study the discharge mode transition in Ar inductively coupled plasma. Electron density and plasma emission intensity are measured during the E （capacitive discharge） to H （inductive discharge） mode transitions at different pressures. It is found that plasma exists with a low electron density and a weak emission intensity in the E mode, while it has a high electron density and a strong emission intensity in the H mode. Meanwhile, the plasma emission intensity spatial （2D an asymmetric profile in the E mode. Moreover, the at high pressure, but increase almost continuously at image） profile is symmetrical in the H mode, but the 2D image is electron density and emission intensity jump up discontinuously the E to H mode transition under low pressure.
