YBa2Cu3O7-x （YBCO） superconducting film was fabricated on {001} LaAlO3 （LAO） substrate by pulse laser deposition （PLD）, and its microstructure was examined by high resolution X-ray diffraction technology （HRXRD）, such as pole figure, rocking curve, reciprocal space mapping. The results show that the YBCO crystalline alignment is almost {001}YBCO//{001}LAO, 100YBCO//100LAO besides 2% {001}YBCO//{001}LAO, 110YBCO//100LAO. The out-plane alignment of YBCO is some spreading （the breadth is 0.75°）. There are 90°±0.65°110 twin domains in the film, which is caused by the high local stress and stress difference between 100 and 010 during the tetragonal to orthorhombic phase transition.
